Design of an Optical Gas Sensor Based on SiliconB. Gesemann1,J. Üpping1, A. v. Rhein,2, S.L. Schweizer1, D. Pergande1, R. B. Wehrspohn*,1
1Martin Luther University of Halle, 2University of Paderborn
*Corresponding author: Martin Luther University of Halle – AG μMD,
Heinrich Damerow Str. 4, D-06108 Halle,
ralf.wehrspohn@physik.uni-halle.de